A polishing composition capable of satisfactorily polishing a
semiconductor. The first polishing composition of the present invention
includes silicon dioxide, at least one component selected from periodic
acids and salts thereof, at least one component selected from tetraalkyl
ammonium hydroxides and tetraalkyl ammonium chlorides, hydrochloric acid,
and water, and contains substantially no iron. The second polishing
composition of the present invention includes a predetermined amount of
fumed silica, a predetermined amount of at least one component selected
from periodic acids and salts thereof, a tetraalkyl ammonium salt
represented by the following general formula (1), at least one component
selected from ethylene glycol and propylene glycol, and water. The pH of
the second polishing composition is greater than or equal to 1.8 and is
less than 4.0. ##STR00001##