An ultraviolet sensor includes a substrate; a diamond layer, placed on the
substrate, functioning as a detector; and at least one pair of surface
electrodes arranged on the diamond layer. The diamond layer has a
detecting region present at the surface thereof, the detecting region has
at least one sub-region exposed from the surface electrodes, and the
sub-region has a covering layer, made of oxide or fluoride, lying
thereon. A method for manufacturing the ultraviolet sensor includes a
step of forming a diamond layer, functioning as a detector, on a
substrate; a step of forming at least one pair of surface electrodes on
the diamond layer; and a step of forming a covering layer, made of oxide
or fluoride, on at least one sub-region of a detecting region present at
the surface of the diamond layer, the sub-region being exposed from the
surface electrodes.