An integrated micropump or a plurality of integrated micropumps are
communicated to a plurality of analysis chambers. A plurality of
integrated analysis chambers include integrated analysis devices to test
a fluid for an analyte. The micropumps continuously or periodically pump
the fluid into the analysis chambers and flush the analysis chambers
after analysis of the analyte. In one embodiment, the analysis device
comprises an integrated LED and an integrated optical detector. The LED
and detector are tuned to an optical absorption line of the analyte. The
micropumps are composed of nitrides of B, Al, Ga, In, Tl or combinations
thereof and fabricated using photoelectrochemical techniques. The
analysis chambers, and micropumps including the analysis devices are
simultaneously fabricated during which fabrication of the micropumps and
the analysis devices are masked from the photoelectrochemical techniques.