The application describes a mixed olefin polymerization catalyst composition comprising a support, a reaction product of at least one first organometallic compound and a first activator capable of rendering the first organometallic compound active for insertion polymerization, and at least one second organometallic compound, the activator incapable of rendering the second organometallic compound active for polymerization of the monomers. The mixed catalyst composition can be used to prepare a first polymer component in a first polymerization reactor stage and then, when an effective activator is added for the second organometallic compound, the catalyst composition can be used to prepare a second polymer composition that is homogeneously blended with the first polymer component.

 
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> Halftone phase shift mask blank, and method of manufacture

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