A dual-axis accelerometer and processing circuit are provided. The
accelerometer has a plurality of fixed electrodes supported on a
substrate and fixed capacitive plates arranged in first and second
sensing axes. An inertial mass is suspended over a cavity and includes
movable capacitive plates arranged to provide a capacitive couplings with
the fixed capacitive plates. The inertial mass is movable relative to the
plurality of fixed electrodes. The accelerometer has a plurality of
support arms for supporting the inertial mass relative to the fixed
electrodes and allowing movement of the inertial mass upon experiencing
acceleration along the first and second sensing axes. The accelerometer
further has inputs for receiving input signals and an output for
providing an output signal which varies as a function of the capacitive
coupling and is indicative of sensed acceleration. The processing circuit
extracts the components of acceleration along the first and second
sensing axes.