A positive resist composition comprising: at least one compound selected
from a compound capable of generating an acid represented by the formula
(I) as defined herein upon irradiation with actinic rays or radiation and
a compound capable of generating an acid represented by the following
formula (II) upon irradiation with actinic rays or radiation; and a
compound capable of generating an acid represented by the formula (III)
as defined herein upon irradiation with actinic rays or radiation.