An arrangement serves for the adjustment of an optical element (1), in
particular of a lens in an optical system, in particular in a projection
lens system for semiconductor lithography. The optical element (1) is
mounted in a mount (3) by means of a number of bearing feet (2)
distributed over the circumference of the optical element (1) and is
selectively deformable by actuators (5). At least some of the bearing
feet (2) are engaged by the actuators (5) in a region of the respective
bearing foot (2) in such a way that the respective bearing foot (2) can
be displaced in the direction of the optical axis (7).