The polishing pad of this invention is a polishing pad effecting stable
planarizing processing, at high polishing rate, materials requiring
surface flatness at high level, such as a silicon wafer for semiconductor
devices, a magnetic disk, an optical lens etc. This invention provides a
polishing pad which can be subjected to surface processing to form a
sheet or grooves, is excellent in thickness accuracy, attains a high
polishing rate, achieves a uniform polishing rate, and also provides a
polishing pad which is free of quality variations resulting from an
individual variation, easily enables a change the surface patterns,
enables fine surface pattern, is compatible with various materials to be
polished, is free of burrs upon forming the pattern. This invention
provides a polishing pad which can have abrasive grains mixed at very
high density without using slurry, and generates few scratches by
preventing aggregation of abrasive grains dispersed therein. The
polishing pad of this invention has a polishing layer formed from a
curing composition to be cured with energy rays, the polishing layer
being formed surface pattern thereon by photolithography. The polishing
pad of this invention comprises a polishing layer resin having abrasive
grains dispersed therein, the resin containing ionic groups in the range
of 20 to 1500 eq/ton.