A method of controlling a track apparatus in a lithocell apparatus
arrangement, is presented herein. The lithocell includes a lithographic
exposure apparatus configured to expose substrates and a track apparatus
configured to prepare substrates before exposure and develop substrates
after exposure. The method includes predicting times at which the
lithographic exposure apparatus will be available to accept a prepared
substrate for exposure from the track apparatus, and adjusting a rate at
which the track apparatus prepares substrates so that a substrate is
prepared in time for acceptance by the lithographic exposure apparatus.