A high density multi-layer microcoil includes a substrate, a multi-layer
coil winding, a magnetic core and a dry film photoresist structure. The
multi-layer coil winding and the magnetic core are supported by the dry
film photoresist structure. The fabrication process is using
photolithography process to form a dry film photoresist structure with a
coil tunnel having coil elements perpendicular to the substrate and two
outlets at ends of the tunnel; and injecting a conductive material with a
low melting point into the tunnel and forming the coil winding.