A method of sensing the amount of a gas in a fluid flow includes operating
an acoustic wave (AW) sensor at a first resonant frequency. The AW sensor
includes a high temperature stable piezoelectric plate coupled to a first
gas-absorbing layer. Also included is combining a fluid flow having a gas
component with the first gas-absorbing layer at a temperature of at least
about 500.degree. C. At least one resonant frequency of the AW sensor is
sensed. The amount of gas in the fluid flow is sensed by correlating the
resonant frequency with the amount of gas absorbed in the first
gas-absorbing layer.A sensor for sensing the amount of a gas in a fluid
flow includes a first gas-absorbing layer, a high-temperature-stable
piezoelectric plate coupled to the first gas-absorbing layer, and a
controller coupled to the high-temperature-stable piezoelectric plate.
The controller is coupled to the high-temperature stable piezoelectric
plate to measure a resonant frequency in the high temperature stable
piezoelectric plate correlated with an amount of gas absorbed by the
first gas absorbing layer, whereby the amount of a gas in a fluid flow is
sensed. The high-temperature-stable piezoelectric plate is formed of at
least one material selected from the group consisting of AlN, GaN,
Al.sub.1-xGa.sub.xN (0.ltoreq.x.ltoreq.1), GaPO.sub.4, AlPO.sub.4, and
materials having the crystal structure of
Ca.sub.2Ga.sub.2Ge.sub.4SiO.sub.14, e.g.,
Ca.sub.2Ga.sub.2Ge.sub.4SiO.sub.14, La.sub.3Ga.sub.5SiO.sub.14,
La.sub.3Ga.sub.5.5Nb.sub.0.5O.sub.14,
La.sub.3Ga.sub.5.5Ta.sub.0.5O.sub.14, and the like.