A method of fabricating a mold and a method of fabricating an article with the mold is disclosed that is capable of fabricating a high three-dimensional surface structure and extending the service life of the mold. A mold having a fine surface shape of a height less than an object height is fabricated, then the fine surface shape of the mold is transferred to an intermediate mold by dry-etching, and then the fine surface shape of the intermediate mold is further transferred to a final article material by dry-etching. In each transfer step by dry-etching, the etching selection ratio is appropriately adjusted to increase the height of the fine surface structure step by step, so that the fine surface shape of the final article material has the object height. On the surface of the final article material, a preliminary pattern of the object surface shape may be formed beforehand to reduce the required thickness of the curable resin.