A central computer receives from a supplier a parameter set for a data technologically parameterizable device and buffer-stores it. The central computer communicates the parameter set to a decision-maker. It incorporates the parameter set into a parameter set list if the central computer is prescribed an acceptance command by an operator. Parameter sets incorporated into the parameter set list can be communicated from the central computer to an interrogator at the request of the interrogator.

 
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> Method and apparatus for endpointing mechanical and chemical-mechanical polishing of substrates

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