The invention relates to a method for optically detecting at least one
entity which is arranged on a substrate. The at least one entity is
scanned with a measuring volume using at least one radiation source and a
confocal optic. During a scanning process an auxiliary focus is generated
by means of at least one second radiation source and a second optic.
Radiation generated by the first radiation source is collimated by a
first optic and radiation generated by the second radiation source is
collimated by a second optic. A retroreflection from the auxiliary focus
is detected by at least one detector and is used to measuring the
position of an interface and, thus, for indirectly positioning the
measuring volume. The position of the auxiliary focus relative to the
measuring volume is adjustable in a defined manner.