A refrigerant supply apparatus for supplying a refrigerant to a cooling
target. The apparatus includes a refrigerant supply channel through which
pure water as the refrigerant is supplied to the cooling target, an
impurity removing unit disposed in an impurity removing channel which is
a channel different from the refrigerant supply channel, a sensor which
measures a purity of the pure water, and a valve which stops supply of
the pure water to the cooling target when the purity of the pure water
does not satisfy a predetermined standard.