A calibration system includes a tube or other conduit, a gas source, and a
computational device. The tube has an end positioned relative to a flow
sensor, and is in communication with the gas source. The tube and gas
source introduce calibration gas into the tube at a repeatable mass flow.
During a calibration operation, the conduit directs at least a portion of
the calibration gas onto the flow sensor. The computational device is
used to calculate an estimated flow rate of the calibration gas based
upon the measurements obtained from the flow sensor.