Provided are encapsulated belts and encapsulated pads for use in a variety
of polishing application, including the chemical-mechanical polishing and
planarization of semiconductor wafers and other workpieces. The
encapsulated belts and pads are characterized by a robust seal between a
polishing layer of the pad or belt and the edges of the subpad layer of
the pad or belt. The robust seal is accomplished by casting a polymer
directly over the subpad layer. The edges of the subpad layer may include
one or more functional features that promote the formation of a
watertight and slurry-resistant seal when the subpad layer is covered
with a cast polymer. Also provided is a method of producing a robust seal
between the polishing layer and the edge region of the subpad by
encapsulating a subpad layer with a polymeric material.