A balanced positioning apparatus comprises a balance mass which is
supported so as to be moveable in the three degrees of freedom, such as X
and Y translation and rotation about the Z-axis. Drive forces in these
degrees of freedom act directly between the positioning body and the
balance mass. Reaction forces arising from positioning movements result
in corresponding movement of the balance mass and all reaction force are
kept within the balanced positioning system. The balance mass may be a
rectangular balance frame having the stators of two linear motors forming
the uprights of an H-drive mounted on opposite sides. The cross-piece of
the H-drive spans the frame and the positioned object is positioned
within the central opening of the frame.