The present invention provides a practical design of a megavoltage x-ray
detector with both high quantum efficiency (QE) and high resolution. The
x-ray detector disclosed herein has a QE that can be an order of
magnitude higher than that of current flat panel systems and yet has a
spatial resolution equivalent to that of current flat panel systems used
for portal imaging. The x-ray detector includes a large number of
micro-structured electrically conducting plates, packed together with
thin spacers placed between neighboring plates with the micro-structured
plates oriented to be parallel to the incident x-rays in operation. Each
plate includes an electrically conductive substrate with a first planar
surface, elongate electrically conductive strip electrodes separated from
each other with strip spacers placed in between and sitting on an
insulating layer interposed between the first planar surface of the
electrically conductive substrate and the strip electrodes. A power
supply applies a bias voltage between each electrically conductive
substrate and the electrically conductive strip electrodes, whereby
x-rays absorbed in the conductive substrate generates high energy
electrons which produce ions in an ionization medium located in spaces
between the conductive substrate and the electrically conductive strips.
A detector detects an electrical current generated in the electrically
conductive strip electrodes and a 2D active readout matrix is coupled to
the detector.