A continuous-flow filter/concentrator for separating and/or concentrating particles in a fluid is disclosed. The filter is a three-port device an inlet port, an filter port and a concentrate port. The filter separates particles into two streams by the ratio of their dielectrophoretic mobility to their electrokinetic, advective, or diffusive mobility if the dominant transport mechanism is electrokinesis, advection, or diffusion, respectively.Also disclosed is a device for separating and/or concentrating particles by dielectrophoretic trapping of the particles.

 
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> Method of fabricating micro-electromechanical systems

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