A non-volatile memory resistor cell with a nanotip electrode, and
corresponding fabrication method are provided. The method comprises:
forming a first electrode with nanotips; forming a memory resistor
material adjacent the nanotips; and, forming a second electrode adjacent
the memory resistor material, where the memory resistor material is
interposed between the first and second electrodes. Typically, the
nanotips are iridium oxide (IrOx) and have a tip base size of about 50
nanometers, or less, a tip height in the range of 5 to 50 nm, and a
nanotip density of greater than 100 nanotips per square micrometer. In
one aspect, the substrate material can be silicon, silicon oxide, silicon
nitride, or a noble metal. A metalorganic chemical vapor deposition
(MOCVD) process is used to deposit Ir. The IrOx nanotips are grown from
the deposited Ir.