Provided is a Fabry-Perot type wavelength tunable optical filter,
comprising a first mirror; a second mirror located over the first mirror;
a driving body located over the first mirror, and having both ends fixed
to the first mirror through a spacer; a plurality of electrodes, each
formed on both ends of the driving body; a rod structure connecting a
center of the driving body and the second mirror; a plurality of fixing
means, each fixed to the first mirror at both sides of the rod structure
through the spacer; and a plurality of elastic bodies connecting the rod
structure with the plurality of fixing means and acting as a rotational
axis. And the mirror is driven by the rod structure acting as a lever
that has an elastic body as a rotational axis, when warping is generated
by electro-thermal expansion, electromagnetic force or external force.
Thereby the mirror can be driven in the larger wavelength tunable range
and the low power consumption.