A method of adjusting a projection objective permits the projection
objective to be adjusted between an immersion configuration and a dry
configuration. The projection objective includes optical elements
arranged along an optical axis thereof, which include a first group of
elements following the object plane and a last optical element following
the first group, which is arranged near the image plane. The last optical
element defines an exit surface of the projection objective, which is
arranged at a working distance from the image plane. The last optical
element is substantially without refracting power and has no or only
slight curvature. The method includes varying the thickness of the last
optical element, changing the refractive index of the space between the
exit surface and the image plane by introducing or removing an immersion
medium, and axially displacing the last optical element to set a working
distance.