A lubricant applying unit includes a lubricant composed of metal salt of fatty acid; an applying member that applies the lubricant on a subject under lubricant application; and a spreading member that forms a thin layer of the lubricant applied on the subject. The spreading member spreads the lubricant in such a manner that a thickness of the thin layer is in a range of 8 nanometers to 12 nanometers.

 
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> Electrostatic chuck and production method therefor

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