A nonvolatile semiconductor memory device whose gate structure of a
transistor other than a memory cell transistor has a same stacked gate
structure as the memory cell transistor, the gate structure comprising a
semiconductor substrate, a first insulation film provided on the
semiconductor substrate, a first conductive film provided on the first
insulation film, a second insulation film, provided on the first
conductive film, having an opening, a spacer provided on the second
insulation film to define the opening, and a second conductive film
provided on the spacer and electrically connected to the first conductive
film via the opening.