A method and apparatus for thermal treatment of tissue by irradiating the skin with electromagnetic energy is disclosed. Sources of electromagnetic energy include radio frequency (RF) generators, lasers, and flashlamps. The apparatus includes either a positional sensor or a dosage evaluation sensor, or both types of sensors. These sensors provide feedback to a controller. The controller may control the electromagnetic source parameters, the electromagnetic source activation, and/or the sensor measurement parameters. An additional scanning delivery unit may be operably coupled to the controller or to the sensors to provide a controlled distribution of electromagnetic energy to the target region of the skin. The use of positional measurement sensors and dosage evaluation sensors permits the controller to automatically determine the proper electromagnetic source parameters including, for example, pulse timing and pulse frequency.