Embodiments of a polishing article for processing a substrate are
provided. In one embodiment, a polishing article for processing a
substrate comprises a fabric layer having a conductive layer disposed
thereover. The conductive layer has an exposed surface adapted to polish
a substrate. The fabric layer may be woven or non-woven. The conductive
layer may be comprised of a soft metal and, in one embodiment, the
exposed surface may be planar.