An X-ray analysis apparatus in which X-rays emitted from an X-ray source
are applied to a sample and a two-dimensional CCD sensor detects the
X-rays diffracted by the sample. The X-ray analysis apparatus includes a
scan-moving means for scan-moving the two-dimensional CCD sensor in a
plane, and a charge-transfer signal generating means for generating a
charge-transfer signal in the CCD sensor, every time the CCD sensor is
moved for a distance corresponding to the width of a pixel constituting
the CCD sensor. Hence, the motion of the semiconductor X-ray detecting
means and the generation of the charge-transfer signal are synchronized
with each other to achieve time delay integration operation. Since the
timing of transfer of electric charges in the CCD sensor is synchronized
with scan-motion velocity of the CCD sensor, each pixel can accurately
analyze the intensity of the X-ray diffracted at each diffraction angle.