An apparatus through which a substrate may be transferred between a first
chamber and a second chamber in which the first chamber is maintained at
a high temperature relative to the ambient temperature of the second
chamber. The apparatus comprises a passageway for receiving the substrate
and a thermally isolating interface. The thermally isolating interface
reduces heat transfer from the first chamber to the second chamber and
allows for transfer of the substrate between the apparatus and the second
chamber. The thermally isolating interface includes a hole having
dimensions such that the substrate is transferrable through the thermally
isolating interface.