In a method of generating and/or executing a diversified program flow from a program source code for or on at least two processing units of a machine tool, production machine or robot, a machine code is generated from a program source code by a compiler for at least one processing unit with a programmable processing module. The program source code is also used to generate by a converter or interpreter a description file which is run interpretatively in at least one further processing unit by at least one programmable processing module. Data of the processing units is saved in at least one common memory and checked for a match through respective data comparison.