The present invention provides an electrolytic processing apparatus and an
electrolytic processing method which can perform processing of a
substrate without destroying devices formed in the substrate even when a
fragile material is employed in the substrate and which can reduce
non-uniformity in the contact pressure of an electrode member on a
substrate during processing, thereby equalizing the processing amount in
the entire processing surface of the substrate and the surface roughness
after processing. The electrolytic processing apparatus includes: a
substrate holder for holding a substrate; an electrode base provided with
an electrode member for contact with the substrate, held by the substrate
holder, in the presence of a liquid to effect processing of the
substrate; and a support base for floatingly supporting the electrode
base by a floating mechanism.