For the purpose of providing a discharge excitation type pulse laser
apparatus capable of reducing disturbance of the discharge space caused
by shock waves, the discharge excitation type pulse laser apparatus
according to the present invention is designed for generating a pulsed
main discharge by applying a high voltage between main electrodes (14,
15) including a cathode (15) and an anode (14) arranged in opposition to
each other, and thereby exciting a laser gas in a discharge space (37)
defined between the main electrodes to oscillate laser light (21), and
characterized in that no reflector larger than a prescribed size is
provided on a surface within a prescribed surface distance (LC) from the
discharge space (37), and an insulating cathode insulating member (54)
that is inclined such that the cathode (15) side end is highest is
arranged on at least one of the upstream and downstream sides of the
cathode (15) in close contact with the cathode (15).