A screw vacuum pump which allows reduced power, lower inside gas
temperature, and reduced discharging time. The pump has a pair of screw
rotors rotatively engaged with each other in a pump casing to discharge a
gas along a longitudinal direction of the pump. Each rotor has three
types of helical teeth serially located in a longitudinal direction of
the rotor and different from each other in theoretical displacement
volume. A bypass conduit communicating with a delivery side of the pump
is connected via a first check valve to a first intermediate space
defined between the first helical teeth and the second helical teeth and
via a second check valve to a second intermediate space defined between
the second helical teeth and the third helical teeth. The gas is
compressed at the third stage to half the first stage volume before a
discharge port opens.