The invention is directed to an arrangement for generating a pulsed laser
beam with high average output, in particular for generating a hot plasma
which emits extreme ultraviolet (EUV) radiation. It is the object of the
invention to find a novel possibility for generating a laser beam with a
high repetition rate and average output which allows the repetition
frequency and, therefore, the output of the laser system to be increased
by connecting together a plurality of individual lasers having limited
repetition rate without degradation of the beam quality on the target
compared to that of an individual laser. This object is met, according to
the invention, in that an oriented mirror surface is associated with each
individual laser in such a way that a beam bundle which is emitted by
each individual laser so as to be offset with respect to time and which
is reflected at the mirror surface is coupled into a common beam path,
and laser pulses in the common beam path are directed to a target one
after the other in a regular, defined pulse sequence, and, with a
continuously dynamic mirror movement for coupling the laser pulses into
the common beam path, optical means are provided in the common beam path
for compensating the directional change caused by the mirror movement.