A head gimbal assembly comprising a slider having a readwrite sensor; a
suspension to load the slider; a micro-actuator; wherein the
micro-actuator comprises a piezoelectric unit with two piezoelectric
elements and a support base having a base to be coupled with the
suspension physically, a moving plate to be coupled with the two
piezoelectric elements, and a leading beam to connect with the base and
the moving plate. Also disclosed is a micro-actuator comprising inter
alia a piezoelectric unit with two piezoelectric elements. A method of
forming a micro-actuator is also disclosed, which method comprising
forming a piezoelectric unit having two piezoelectric elements; forming a
support base having a base, a moving plate, and a leading beam to connect
with the base and the moving plate; and bonding the piezoelectric unit to
one side of the support base. Also disclosed is a method of forming a
slider, a suspension and a micro-actuator.