A projection system for imaging an object field onto an image field,
including at least two partial objectives (S1, S2); at least one
intermediate image field between the partial objectives (S1, S2); and a
concave reflector (119, 219) having a concave reflecting surface. The
concave reflecting surface crosses an optical axis of the projection
system proximate along the optical axis to the intermediate image field.
Alternatively or in addition, the concave reflecting surface crosses an
optical axis of the projection system at a position where the condition
|H.sub.CR/H.sub.MR|.gtoreq.2 is met, with H.sub.CR being a chief ray
height and H.sub.MR being a marginal ray height with respect to the
optical axis. Alternatively or in addition, the concave reflecting
surface crosses an optical axis of the projection system at a position
where the condition: d=y*L is met, with d being an axial distance from
the concave reflecting surface to the intermediate image field, and with
L being the total geometrical light path travelled by a light beam along
the optical axis from the object field to the image field, wherein y
ranges from 0 to 0.10.