A method for manufacturing a ferroelectric capacitor in accordance with
the present invention includes: (a) a step of forming a ferroelectric
laminated body by successively laminating a lower electrode layer, a
ferroelectric layer and an upper electrode layer over a base substrate;
(b) a step of patterning at least the upper electrode layer and the
ferroelectric layer by dry etching; (c) a step of coating a coating
composition including a compound having an element composing the
ferroelectric layer at least on a side wall of the ferroelectric layer;
and (d) a step of thermally treating the coating composition, to
crystallize the coating composition coated on the side wall of the
ferroelectric layer.