The present invention provides an epitaxial imprinting process for
fabricating a hybrid substrate that includes a bottom semiconductor
layer; a continuous buried insulating layer present atop said bottom
semiconductor layer; and a top semiconductor layer present on said
continuous buried insulating layer, wherein said top semiconductor layer
includes separate planar semiconductor regions that have different
crystal orientations, said separate planar semiconductor regions are
isolated from each other. The epitaxial printing process of the present
invention utilizing epitaxial growth, wafer bonding and a
recrystallization anneal.