A system and method for detecting defects in semiconductor wafers in a
rapid non-destructive manner. Defects in semiconductor wafers can include
micropipes and screw dislocations, stress striations, planer defects,
polytype inclusions, and others. When a wafer is illuminated by polarized
light, the defects induce birefringence of the polarized light that can
be visualized by a polariscope to detect defects in wafers. Defects can
cause linearly inputted polarized light to emerge as elliptically
polarized light after transmission through a wafer having defects.
Placing the wafer between a set of polarizers under the cross poles
condition allows for a rapid non-destructive system and method for
delineating and locating defects within a semiconductor wafer.