The present invention provides a positioning apparatus capable of
performing six-axis micro adjustment of an optical element in an exposure
apparatus with high accuracy, and the exposure apparatus. The positioning
apparatus of the present invention includes a first measurement unit for
measuring a position/inclination of a moving part having an optical
element while being kept from contact with the moving part, and a driving
unit capable of driving the moving part in directions of six axes with
respect to a fixed part while being kept from contact with the moving
part, based on the result of measurement by the first measurement unit.