An exposure apparatus includes a projection optical system for projecting
a pattern on a reticle onto an object to be exposed, a reference mark
that serves as a reference for an alignment between the reticle and the
object, a first fluid that has a refractive index of 1 or greater, and
fills a space between at least part of the projection optical system and
the object and a space between at least part of the projection optical
system and the reference mark, and an alignment mechanism for aligning
the object by using the projection optical system and the first fluid.