Electronic devices are constructed by a method that includes forming a
first conductive layer in an opening in a multilayer dielectric structure
supported by a substrate, forming a core conductive layer on the first
conductive layer, subjecting the core conductive layer to a H.sub.2
plasma treatment, and depositing a capping adhesion/barrier layer on the
core conductive layer after the H.sub.2 plasma treatment. The multilayer
dielectric structure provides an insulating layer for around the core
conducting layer and at least one sacrificial layer for processing. The
H.sub.2 plasma treatment removes unwanted oxide from the surface region
of the core conducting layer such that the interface between the core
conducting layer and the capping adhesion/barrier is substantially free
of oxides. In an embodiment, the core conducting layer is copper with a
titanium nitride or zirconium capping adhesion/barrier layer.