A method, system and medium is provided for enabling improved control
systems. An error, or deviation from a target result, is observed for
example during manufacture of semiconductor chips. The error within
standard deviation is caused by two components: a white noise component
and a signal component (such as systematic errors). The white noise
component is, e.g., random noise and therefore is relatively
non-controllable. The systematic error component, in contrast, may be
controlled by changing the control parameters. A ratio between the two
components is calculated autoregressively. Based on the ratio and using
the observed or measured error, the actual value of the error caused by
the systematic component is calculated utilizing an autoregressive
stochastic sequence. The actual value of the error is then used in
determining when and how to change the control parameters. The
autoregressive stochastic sequence addresses the issue of the effects of
run-to-run deviations, and provides a mechanism that can extract the
white noise component from the statistical process variance in real time.
This results in an ability to provide tighter control, for example in
feedback and feedforward variations of process control.