To provide an X-ray microscopic inspection apparatus capable of performing
non-destructive inspection with high resolving power within a very short
period, and having advantageous functions such as a high precision
electron probe control function, a CT function, an elemental analysis
function, and a target switching function. The apparatus includes a
magnetic superposition lens having a magnetic field generating portion
disposed in the vicinity of an electron generating portion of an electron
gun; reflected electron detecting means having a detecting portion
disposed above the target for X-ray generation, for detecting a reflected
electron from the target; and electron image generating means for
performing imaging of a target surface utilizing the signals from the
reflected electron detecting means, wherein the apparatus is arranged so
that alignment including focus adjustment to the target for X-ray
generation and astigmatism correction may be performed based on image
information of the electron image. Further, the apparatus is equipped
with functions such as the electron probe control function, the CT
function, the electron axis alignment function the elemental analysis
function, and the target switching function.