A flash memory cell comprising a silicon-germanium layer with a pair of
source/drain regions. A strained silicon layer is formed over the
silicon-germanium layer such that the pair of source/drain regions is
linked by a channel in the strained silicon layer. A floating gate layer
is formed over the channel. The floating gate layer has at least one
charge storage region. The floating gate layer may be a planar floating
gate, a planar split floating gate, or a vertical split floating gate. A
control gate is formed over the floating gate layer. Ballistic direct
injection is used to program the memory cell. A first charge storage
region of the floating gate layer establishes a virtual source/drain
region in the channel. The virtual source/drain region has a lower
threshold voltage than the remaining portion of the channel.