A microelectrical mechanical system (MEMS) actuator having electrically
conductive coils that create first magnetic fields that are opposed by a
second magnetic field is disclosed. The actuator includes two coils
having dual, interspersed Archimedean spirals. Within an actuator, one
coil is arranged with spirals that proceed clockwise, while the other
coil is provided with spirals that proceed counterclockwise. An
electrically conductive bridge mechanically couples the two coils of each
actuator to a mirror. Opposing magnetic fields are created to provide a
force that urges the coils to expand so that the outermost portions of
the coil extend upward, away from the substrate, and lift the bridge and
mirror. Control current may then be modulated to increase and decrease
the coil's magnetic field strength thereby increasing and decreasing the
coil's extension to raise and lower relative to the substrate.