The present invention provides a method for producing a conducting doped
diamond-like nanocomposite film containing, as basic elements, carbon,
silicon, metal, oxygen and hydrogen. The film is produced as follows: a
substrate is disposed in a vacuum chamber, and a voltage of 0.3-5.0 kV is
applied to the substrate; a gas discharge plasma with an energy density
of more than 5 kilowatt-hour/gram-atom of carbon particles is generated,
and an organosiloxane compound is evaporated into the plasma; a beam of
particles of a dopant is introduced into the plasma; and a film is grown
on the substrate to produce a conducting doped carbon nanocomposite film
with a predetermined relationship of atomic concentrations of carbon,
metal and silicon. The film surface is coated with a silicon dioxide
layer. A unidirectional alternating current is passed through the film in
a current generator mode to effect electric thermal exposure of the film.
As the result, a conducting doped diamond-like nanocomposite film having
a multilayer structure is produced.