An ion introduction system for selecting ions from one of two separate ionization sources of ions is provided. The system includes a plate having a hole formed therethrough, the plate for being disposed adjacent an ion introduction region of a gas phase ion analyzer such that the hole is selectively movable between a first location in which the hole is adjacent to a first ionization source of ions for supporting introduction of ions from the first ionization source of ions into the gas phase ion analyzer, and a second location in which the hole is adjacent to a second ionization source of ions for supporting introduction of ions from the second ionization source of ions into the gas phase ion analyzer. The system also includes a drive mechanism for driving the plate between a first position in which the hole is at the first location and a second position in which the hole is at the second location.

 
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> Inspection apparatus for circuit pattern

~ 00350