A method of optimizing a set of steps in a semi-conductor processing
system comprising a software control program, wherein the semi-conductor
processing system includes a first function, a second function, and a
third function, and further includes a memory for storing a set of
variables, and wherein the set of steps further includes a first step, a
second step, and a third step. The invention includes generating the
first step on an editor application, wherein the first function is added
to the first step, and if required, a first set of user input
instructions is added. The invention also includes generating the second
step on the editor application, wherein the second function is added to
the second step, and if required, a second set of user input instructions
is added; and generating the third step on the editor application,
wherein the third function is added to the third step, and if required, a
third set of user input instructions is added. The invention further
includes placing the first step, the second step, and the third step in a
proper order; transferring the set of steps to the semi-conductor
processing system; executing the set of steps; storing a set of results
in the set of variables; and, if required, generating a report from the
set of variables.