The invention provides an optical interconnection circuit, of which a signal transmission speed can be increased, and which can be easily microminiaturized and manufactured, a manufacturing method thereof, an electro-optical device including the circuit, and electronic equipment including the circuit. An optical interconnection circuit includes: a first micro tile element having a light emitting function; a second micro tile element having a light receiving function; which are attached to a substrate, and an optical wave-guide including an optical wave-guide member formed on the substrate to connect at least the first micro tile element and the second micro tile element each other.